iCAP™ TQs ICP-MS


Thermo Scientific™ iCAP™ TQs ICP-MS is a high-performance ICP-MS for ultratrace quantification of trace elements in a variety of challenging matrices related to the semiconductor industry.

Benefit from ultratrace analysis and expand your laboratory application portfolio, securely as operators can quickly adopt triple quadrupole ICP-MS through the use of Thermo Scientific™ Qtegra™ Intelligent Scientific Data Solution™ (ISDS) Software.

The Thermo Scientific iCAP TQs ICP-MS delivers enhanced interference removal capabilities to improve elemental impurity detection in the most challenging matrices. With a small footprint and unique ease of use through streamlined workflows and automated method development, iCAP TQs ICP-MS is the ideal inspection tool for on-line quality control to ensure consistency of critical manufacturing processes and improve semiconductor wafer fabrication yields.

RELATED PRODUCTS